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SEM
6335F Specifications and Capabilities
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Resolution (Secondary Electron Image)
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1.5 nm (at 15 KV) / 5.0 nm (at 1.0 KV) |
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Accelerating Voltage
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0.5 to 30 KV |
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Magnification
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10X to 500,000X |
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Imaging Modes
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SEI, BEI |
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Lens System
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Electro-magnetic 3 lens system |
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Specimen Stage
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X=50 mm, Y=70 mm, Z=4-8-15-25-39 mm |
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Tilting
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-5 to +60 degrees |
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Rotation
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360 degrees (endless) (motor driven) |
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Digital Image
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Up to 2048 x 2048 pixels |
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Display Image
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1280 x 1024 pixels |
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Image Selector
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SEI, COMPO, TOPO, EDS, AUX, image processing |
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Auto Functions
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AFD (Auto Focus), ACB (Auto Contrast and Brightness Control), ASD (Auto Stigmator), AFD+ACB, Auto Photo |